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Microelectromechanical Digital-to-Analog Converter
Author: Hsin-Hung Liao
Abstract:
In this work, we develop a microelectromechanical digital-to-analog converter (MEM-DAC) device which serves as a reference mirror with precise nanoscale step motion for a white-light interferometry system. The proposed mechanism converts a 4-bit digital signal to a mechanical out-of-plane displacement that is proportional to the analog value represented by the 4-bit binary code. A fabrication process which can realize a relatively large movable mirror without etching holes is proposed. Measured results are also presented.
Fig. 1. The SEM pictures of the fabricated device.
Fig. 2. The picture of the assembled device.
Publication:
H.-H. Liao and Y.-J. Yang, "A Microelectromechanical Digital-to-Analog Converter As The Step-Motion Reference Mirror for A White-Light Interferometry System," IEEE-NEMS 2010, Xiamen, China, Jan. 20-23, 2010
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