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A novel 2X2 MEMS optical switch using the split cross-bar design
 
Authors: Bo-Ting Liao, Wen-Cheng Kuo
 
Abstract:
In this paper, a novel 2 × 2 MEMS optical switch is presented. The switch, which employs the proposed split cross-bar (SCB) design, intrinsically possesses advantages over typical 2 × 2 MEMS switches of traditional designs, such as the cross-bar design and the mirror-array design. In comparison to the cross-bar switches, the SCB switch does not have the constraint on the mirror thickness which affects fiber alignment significantly. In comparison to the mirror-array switches, the SCB switch requires fewer movable mirrors and thus gives better fabrication yield. The SCB device can be easily fabricated by employing inductively-coupled-plasma etching (ICP) on a silicon-on-insulator (SOI) wafer with one photo-mask. Electro-thermal V-beam actuators integrated with the bi-stable mechanisms are employed to move and latch the movable mirrors of the proposed device. The displacement of the movable mirrors is at least 60 μm under a driving voltage of 40 V. The optical performance and the dynamic response of the SCB switch are also investigated. The measured average insertion loss is less than −1.4 dB with a deviation of 0.08 dB. Also, the measured switching time is about 10 ms.
 
 
Fig. 1. The schematics of the electro-thermal V-beam actuators and the bi-stable mechanism that are used in the SCB switch.
 
 
Fig. 2. The bi-stable mechanism.
 
 
Fig. 3. Fixed mirrors and movable mirrors.
 
Publication:
  1. Y.-J. Yang, B.-T. Liao, and W.-C. Kuo “A novel 2x2 MEMS optical switch using the split-cross-bar design”, Journal of Micromechanics and Microengineering (JMM), Vol. 17, 2007, pp. 875-882
  2. B.-T. Liao, W.-C. Kuo and Y.-J. Yang, “Development of a new micromachined 2X2 optical switch without optical misalignment”, Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT), Singapore, Jun. 2006.
 

   

 
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