Micro-Electro-Mechanical Systems (MEMS) are the multi-energy-domain micro-devices which are typically fabricated by lithography-based techniques (e.g., micromachining processes or CMOS processes).  The corresponding researches  explore the micro and nano worlds, and realize minuacturized sensors, actuators, and electronics for many applications.  The research topics of Prof. Yao-Joe Yang’s MEMS Laboratory include but are not limited to:

1.     Flexible electronics and sensing array: Flexible artificial skin applied for bionic sensing of intelligent robots/tactile and temperature sensing array.

2.     Nano characterization: Resonator for a Fast-Scan STM System (RF-STM resonator) ; Microelectromechanical Digital-to-Analog Converter (MEMS-DAC)

3.     BioMEMS and microfluidic system: Micropump; Drug delivery system SoC; Miniaturized system for DNA extraction and amplification

4.     Smart system: Smart Pillbox system; Intelligent Pressure Sensing Pad

5.     Optical MEMS: optical switches and variable optical attenuators